| 氣體 |
規(guī)格 |
雜質(zhì)含量（ppm) |
容器 |
容量m3 |
| Ar |
99.999% |
N2≤5.0 H2≤1.0 O2≤2.0
H2O≤4.0 CO+CO2+CH4≤1.0 |
T40 |
6.0 |
| >99.9995% |
CO2<0.5 O2<1.0 H2O<2.0
THC<0.5 N2<3.0 H2<0.5 |
① |
② |
| H2 |
99.999% |
N2≤5.0 O2< 2.0 H2O< 2.0 |
T40 |
5.0 |
| He |
99.999% |
H2 0.5 O2+Ar 2 N2 5
CO2 0.5 CH4 0.5 Ne 0.5
H2O 3 CO 0.5
|
T40 |
6.0 |
| 99.995% |
Ne<1.0 CO<1.0 H2<3
CO2<1.0 O2+Ar<3 CH4<1.0
N2<10 H2O<10 |
T40 |
6.0 |
| N2 |
99.999% |
O2≤3.0 CH4≤0.5 H2≤1.0
H2O≤5.0 |
T40 |
6.0 |
| O2 |
99.999% |
Ar≤2.0 N2≤5.0 H2O< 3.0
CO+CO2+CH4≤1.0
|
|
|
| 99.995% |
H2O≤3.0 CO+CO2+CH4≤5.0 Ar<10.0
N2O<3.0 |
①
T40 |
②
6.0 |
| 99.9% |
|
T40 |
6.0 |
| CO |
99.9% |
|
T40 |
5.0 |
| CO2 |
99.995% |
|
T40 |
24KG |
| 99.999% |
| 99.95% |
| NO |
≥99.9% |
|
① |
② |
| Ne |
99.999% |
N2<2.0 CO<0.05 He<6.0
H2O<1.0 O2+Ar<1.0 CH4<1.0
CO2<0.5 H2<1.0 |
T40 |
6.0 |
| Kr |
99.999% |
CO2<0.5 O2<0.5 CO<0.3
He<3.0 H2≤1.0 CH4<0.2
H2O<1.0 N2<2.0 Ar<0.5
Xe<2.0 C2F6≤0.1 CF4≤0.1
SF6≤0.1 |
① |
② |
| Xe |
>99.999% |
N2<2.0 H2O<2.0 CO2<0.5
Ar<0.5 CO<0.3Kr<0.5 O2<0.5
總徑<0.1 SF6 0.1 CF4 0.1
C2F6 0.1 |
① |
② |
| SF6 |
>99.99% |
N2+O2<0.03% H2O<3.0 CF4<0.03% |
T40 |
50kg |
